Laser-induced vaporization of a stretching sheet of liquid tin-Reference-Cited by-同舟云学术

Laser-induced vaporization of a stretching sheet of liquid tin

Published:2021-02-07 Issue:5 Volume:129 Page:053302
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Liu Bo¹²^ORCID,Meijer Randy A.¹²^ORCID,Hernandez-Rueda Javier¹^ORCID,Kurilovich Dmitry³^ORCID,Mazzotta Zeudi¹^ORCID,Witte Stefan¹²^ORCID,Versolato Oscar O.¹²

Affiliation:

1. Advanced Research Center for Nanolithography (ARCNL), Science Park 106, 1098 XG Amsterdam, The Netherlands

2. LaserLab, Department of Physics and Astronomy, Vrije Universiteit Amsterdam, De Boelelaan 1105, 1081 HV Amsterdam, The Netherlands

3. ASML Netherlands B.V., De Run 6501, 5504 DR Veldhoven, The Netherlands

Funder

Stichting voor de Technische Wetenschappen

H2020 European Research Council

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0036352

Reference28 articles.

1. Efficient 13.5nm extreme ultraviolet emission from Sn plasma irradiated by a long CO2 laser pulse

2. Extreme ultraviolet lithography: Status and prospects

3. Pure-tin microdroplets irradiated with double laser pulses for efficient and minimum-mass extreme-ultraviolet light source production

4. Physical processes in EUV sources for microlithography

5. Light sources for high-volume manufacturing EUV lithography: technology, performance, and power scaling

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