Stress in hard metal films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1807016
Reference9 articles.
1. Aluminum films deposited by rf sputtering
2. Tensile stress in hard metal films
3. Measurement and Interpretation of stress in aluminum-based metallization as a function of thermal history
4. Intrinsic stress in sputter-deposited thin films
5. Residual stresses and ion implantation effects in Cr thin films
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