Residual stresses and ion implantation effects in Cr thin films
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference16 articles.
1. Intrinsic stress in sputter-deposited thin films
2. Stress-related effects in thin films
3. M. Nastasi, J.W. Mayer, J.K. Hirvonen, Ion-Solid Interactions: Fundamentals and Applications, Cambridge Solid State Science Series, Cambridge University Press, Cambridge, 1996
4. Stress relaxation in tungsten films by ion irradiation
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