Tensile stress in hard metal films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1619561
Reference11 articles.
1. Aluminum films deposited by rf sputtering
2. The origins of stress in thin nickel films
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4. Stress and grain growth in thin films
5. Residual stresses in polycrystalline Cu/Cr multilayered thin films
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