Electron spin resonance study of defects in Si‐SiO2structures induced by As+ion implantation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.333413
Reference30 articles.
1. Effect of O+ and Ne+ Implantation on the Surface Characteristics of Thermally Oxidized Si
2. Anomalous residual damage in Si after annealing of ``through‐oxide'' arsenic implantations
3. Residual defects in Si produced by recoil implantation of oxygen
4. Electrical properties of Si implanted with As through SiO2films
Cited by 15 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A novel fabrication strategy for alloyed Cd–Zn–S quantum dots–embedded glass with efficient red emission;Journal of the American Ceramic Society;2022-09-17
2. Point defects at interfacial layers in stacks of (100)Ge with nm-thin HfO2 and GeOx(Ny) insulators probed by electron spin resonance;Microelectronic Engineering;2005-06
3. Boron penetration in p-channel metal–oxide–semiconductor field-effect transistors enhanced by gate ion-implantation damage;Journal of Applied Physics;2001-04-15
4. Chemical etch rates in HF solutions as a function of thickness of thermal SiO2and buried SiO2formed by oxygen implantation;Journal of Applied Physics;1991-05
5. On the origin of the asymmetric ESR lineshape of dangling bonds in a-Si and a-Si:H;Journal of Non-Crystalline Solids;1988-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3