Nanoporous structure of sputter-deposited silicon oxide films characterized by positronium annihilation spectroscopy
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1428787
Reference11 articles.
1. Templating Nanoporosity in Thin-Film Dielectric Insulators
2. Positronium annihilation in mesoporous thin films
3. Determination of pore-size distribution in low-dielectric thin films
4. Probing capped and uncapped mesoporous low-dielectric constant films using positron annihilation lifetime spectroscopy
5. Current and Potential Uses of Positron Beams to Study Porosity in Low-k Dielectric Thin Films
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3. Open Porosity and Pore Size Distribution of Mesoporous Silica Films Investigated by Positron Annihilation Lifetime Spectroscopy and Ellipsometric Porosimetry;Materials;2021-06-18
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