Probing capped and uncapped mesoporous low-dielectric constant films using positron annihilation lifetime spectroscopy
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1318238
Reference13 articles.
1. Positron Annihilation in Polymers
2. Positron and Positronium Annihilation Lifetime Studies of Pores and Free Volumes in Silica Xerogels Prepared by Sol-Gel Process
3. Determination of pore-size distribution in low-dielectric thin films
4. Determination of pore-size distribution in low-dielectric thin films
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