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A detailed ellipsometric porosimetry and positron annihilation spectroscopy study of porous organosilicate-glass films with various ratios of methyl terminal and ethylene bridging groups

  • Published:2020-10 Issue: Volume:306 Page:110434
  • ISSN:1387-1811
  • Container-title:Microporous and Mesoporous Materials
  • language:en
  • Short-container-title:Microporous and Mesoporous Materials

Author:

Rasadujjaman M.ORCID,Wang Y.,Zhang L.,Naumov S.,Attallah A.G.ORCID,Liedke M.O.ORCID,Koehler N.,Redzheb M.,Vishnevskiy A.S.,Seregin D.S.,Wu Y.,Zhang J.,Leu J.,Wagner A.ORCID,Vorotilov K.A.ORCID,Schulz S.E.,Baklanov M.R.

Funder

PAS

MOST-RFBR

RFBR (Russian Foundation for Basic Research), Russia

RFBR, Russia

DFG (German Research Foundation), Germany

HZDR, Germany

Beijing Natural Fund, China

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Mechanics of Materials,Condensed Matter Physics,General Materials Science,General Chemistry

Reference69 articles.

1. Sol–gel silica-based biomaterials and bone tissue regeneration;Arcos;Acta Biomater.,2010

2. High performance single layer nano-porous antireflection coatings on glass by sol-gel process for solar energy applications;Mahadik;Sol. Energy Mater. Sol. Cells,2015

3. Mesoporous thin films: properties and applications;Innocenzi;Chem. Soc. Rev.,2013

4. Low dielectric constant materials for microelectronics;Maex;J. Appl. Phys.,2003

5. Dielectric Films for Advanced Microelectronics;Baklanov,2007

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