Spatial symmetry breaking in single-frequency CCP discharge with transverse magnetic field
Author:
Affiliation:
1. Institute for Plasma Research, Bhat, Gandhinagar 382 428, India
2. Homi Bhabha National Institute, Anushaktinagar, Mumbai 400 094, India
3. Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersey 08543, USA
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5033350
Reference53 articles.
1. Principles of Plasma Discharges and Materials Processing
2. On the efficiency of the electron sheath heating in capacitively coupled radio frequency discharges in the weakly collisional regime
3. Diagnostics of ballistic electrons in a dc/rf hybrid capacitively coupled discharge
4. Analytical solution for capacitive RF sheath
Cited by 27 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Numerical study of the effects of discharge parameters on capacitively coupled plasma in a magnetic field;Journal of Vacuum Science & Technology A;2024-09-01
2. Customized modulation on plasma uniformity by non-uniform magnetic field in capacitively coupled plasma;Plasma Science and Technology;2024-06-01
3. Unconventional apparatuses and diagnostic techniques for studying negative ion plasmas in laboratory devices;Reviews of Modern Plasma Physics;2024-03-13
4. The dynamical behavior of the capacitively coupled argon plasma driven by very high frequency;Modern Physics Letters B;2024-03-12
5. Field reversal in low pressure, unmagnetized radio frequency capacitively coupled argon plasma discharges;Applied Physics Letters;2023-12-25
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3