Author:
Xu Lin,Chen Lee,Funk Merritt,Ranjan Alok,Hummel Mike,Bravenec Ron,Sundararajan Radha,Economou Demetre J.,Donnelly Vincent M.
Subject
Physics and Astronomy (miscellaneous)
Reference22 articles.
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3. PS1-WeA9, American Vacuum Society International Symposium;Honda M.,2008
4. Northern California Chapter of American Vacuum Society Meeting of Plasma Etcher User Group;Chen L.,2006
Cited by
44 articles.
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