On the efficiency of the electron sheath heating in capacitively coupled radio frequency discharges in the weakly collisional regime-Reference-Cited by-同舟云学术

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On the efficiency of the electron sheath heating in capacitively coupled radio frequency discharges in the weakly collisional regime

Published:1995-07-10 Issue:2 Volume:67 Page:191-193
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Buddemeier U.,Kortshagen U.,Pukropski I.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.114663

Reference11 articles.

Cited by 40 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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