Imaging of strain in laterally overgrown GaAs layers by spatially resolved x-ray diffraction
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2748304
Reference14 articles.
1. μm-resolved high resolution X-ray diffraction imaging for semiconductor quality control
2. Local wing tilt analysis of laterally overgrown GaN by x-ray rocking curve imaging
3. Epitaxial Lateral Overgrowth of GaN
4. Laterally overgrown structures as substrates for lattice mismatched epitaxy
5. Tilt and dislocations in epitaxial laterally overgrown GaAs layers
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