Thin palladium silicide contacts to silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.328494
Reference10 articles.
1. Shallow silicide contact
2. Contact reaction between Si and Pd‐W alloy films
3. Silicide formation with Pd‐V alloys and bilayers
4. Shallow silicide‐to‐silicon contacts: The case of amorphous‐Pd80Si20–to–silicon
5. Metallurgical properties and electrical characteristics of palladium silicide-silicon contacts
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