Shallow silicide contact
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.327773
Reference14 articles.
1. Effect of substrate temperature on the microstructure of thin‐film silicide
2. Contact reaction between Si and Pd‐W alloy films
3. Silicide formation with Pd‐V alloys and bilayers
4. Solid‐Solid Reactions in Pt–Si Systems
5. Kinetics and mechanism of platinum silicide formation on silicon
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