Formation of Palladium Silicide Thin Layers on Si(110) Substrates
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference21 articles.
1. Extremely scaled silicon nano-CMOS devices
2. Optimized Silicidation Technique for Source and Drain of Fin-Type Field-Effect Transistor
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1. Structural Changes in Palladium Nanofilms during Thermal Oxidation;Inorganic Materials;2020-10
2. Surface Morphology of NiSi2/Si Films Obtained by the Method of Solid-Phase Deposition;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2020-01
3. Low Temperature Formation of Pd2Si with TiN Encapsulating Layer and Its Application to Dopant Segregation Process;IEICE Transactions on Electronics;2019-06-01
4. Improved Drain Current Saturation and Voltage Gain in Graphene–on–Silicon Field Effect Transistors;Scientific Reports;2016-05-04
5. Kinetics of silicide formation over a wide range of heating rates spanning six orders of magnitude;Applied Physics Letters;2014-07-07
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