Kinetic Monte Carlo simulations of stress and morphology evolution in polycrystalline thin films
Author:
Affiliation:
1. School of Engineering, Brown University, Providence, Rhode Island 02912, USA
Funder
Directorate for Mathematical and Physical Sciences
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/am-pdf/10.1063/1.5085313
Reference49 articles.
1. Measurements of the intrinsic stress in thin metal films
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4. The dynamic competition between stress generation and relaxation mechanisms during coalescence of Volmer–Weber thin films
5. Tutorial: Understanding residual stress in polycrystalline thin films through real-time measurements and physical models
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