The intrinsic stress of polycrystalline and epitaxial thin metal films
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics,General Materials Science
Link
http://stacks.iop.org/0953-8984/6/i=45/a=005/pdf
Reference125 articles.
1. Internal Stresses
2. Recent developments in the study of mechanical properties of thin films
3. Mechanical properties of vacuum-deposited films: A commentary
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