Effective fabrication of three-dimensional nano/microstructures in a single step using multilayered stamp-Reference-Cited by-同舟云学术

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Effective fabrication of three-dimensional nano/microstructures in a single step using multilayered stamp

Published:2006-05-15 Issue:20 Volume:88 Page:203105
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Park Sang-Hu,Lim Tae-Woo,Yang Dong-Yol,Jeong Jun-Ho,Kim Ki-Don,Lee Kwang-Sup,Kong Hong-Jin

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.2204448

Reference21 articles.

1. A Long Pollen Record from Lowland Amazonia: Forest and Cooling in Glacial Times

2. Ultrafast and direct imprint of nanostructures in silicon

3. UV-nanoimprint lithography using an elementwise patterned stamp

4. Fabrication of 5nm linewidth and 14nm pitch features by nanoimprint lithography

5. Ultrafast patterning of nanostructures in polymers using laser assisted nanoimprint lithography

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2. Recent Advances in Analytical Chemistry by 3D Printing;Analytical Chemistry;2016-11-30

3. DLC-Coated Tools for Micro-forming;Micromanufacturing Engineering and Technology;2015

4. Evaluation of resistless Ga+beam lithography for UV NIL stamp fabrication;Nanotechnology;2013-08-13

5. Ultraviolet Nanoimprint Lithography;Nanoimprint Technology;2013-06-18

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