Author:
Rumler M,Fader R,Haas A,Rommel M,Bauer A J,Frey L
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,General Chemistry,Bioengineering
Cited by
3 articles.
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1. Helium ion beam enhanced local etching of silicon nitride;AIP Conference Proceedings;2016
2. Effect of helium ion beam treatment on the etching rate of silicon nitride;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2015-04
3. Generation of 3D nanopatterns with smooth surfaces;Nanotechnology;2014-07-18