Fabrication of 5nm linewidth and 14nm pitch features by nanoimprint lithography
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1766071
Reference17 articles.
1. A Long Pollen Record from Lowland Amazonia: Forest and Cooling in Glacial Times
2. Sub-10 nm imprint lithography and applications
3. Non-Photolithographic Methods for Fabrication of Elastomeric Stamps for Use in Microcontact Printing
4. Step and flash imprint lithography: Template surface treatment and defect analysis
5. Ultrahigh-Density Nanowire Lattices and Circuits
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