Ultrafast and direct imprint of nanostructures in silicon
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/nature00792.pdf
Reference11 articles.
1. Ito, T. & Okazaki, S. Pushing the limits of lithography. Nature 406, 1027–1031 (2000)
2. Rogers, J. A. & Mirkin, C. Emerging methods for micro- and nanofabrication. Mater. Res. Bull. 26, (2001)
3. Chou, S. Y., Krauss, P. R. & Renstrom, P. J. Imprint lithography with 25-nanometer resolution. Science 272, 85–87 (1996)
4. Chou, S. Y. & Zhuang, L. Lithographically induced self-assembly of periodic polymer micropillar arrays. J. Vac. Sci. Technol. B 17, 3197–3202 (1999)
5. Silvesrelli, P. L., Alavi, A., Parrinello, M. & Frenkel, D. Ab initio molecular dynamics simulation of laser melting of silicon. Phys. Rev. Lett. 77, 3149–3152 (1996)
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