Ultrafast patterning of nanostructures in polymers using laser assisted nanoimprint lithography
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1630162
Reference7 articles.
1. Imprint of sub‐25 nm vias and trenches in polymers
2. Imprint of sub‐25 nm vias and trenches in polymers
3. Sub-10 nm imprint lithography and applications
4. Step and flash imprint lithography: Defect analysis
5. Direct three-dimensional patterning using nanoimprint lithography
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