Continuous roller nanoimprinting: next generation lithography-Reference-Cited by-同舟云学术

Continuous roller nanoimprinting: next generation lithography

Author:

Peng Zhiting¹^ORCID,Zhang Yage²,Choi Chin Long Ronald¹,Zhang Pengcheng³^ORCID,Wu Tianzhun³^ORCID,Chan Yau Kei¹

Affiliation:

1. Department of Ophthalmology, The University of Hong Kong, Pokfulam Road, Hong Kong, China

2. Department of Mechanical Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong, China

3. Institute of Biomedical and Health Engineering, Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, China

Abstract

Experience the future of lithography with roller nano imprinting, the revolutionary technology that will revolutionize our production processes.

Funder

University of Hong Kong

Basic and Applied Basic Research Foundation of Guangdong Province

Science, Technology and Innovation Commission of Shenzhen Municipality

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Link

Reference168 articles.

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