Linear electromagnetic excitation of an asymmetric low pressure capacitive discharge with unequal sheath widths
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4938204
Reference32 articles.
1. Principles of Plasma Discharges and Materials Processing
2. Plasma Electronics
3. Physics of Radio-Frequency Plasmas
4. Shaped electrode and lens for a uniform radio-frequency capacitive plasma
5. Ion flux nonuniformities in large-area high-frequency capacitive discharges
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