Ion flux nonuniformities in large-area high-frequency capacitive discharges
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1592617
Reference11 articles.
1. Glow discharge processing in the liquid crystal display industry
2. Capacitively coupled glow discharges at frequencies above 13.56 MHz
3. Verification of frequency scaling laws for capacitive radio‐frequency discharges using two‐dimensional simulations*
4. Very high frequency capacitively coupled discharges for large area processing
5. Very high-frequency capacitively coupled argon discharges
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