Nonlinear transmission line (NTL) model study of electromagnetic effects in high-frequency asymmetrically driven capacitive discharges
Author:
Affiliation:
1. School of Physics, Dalian University of Technology, Dalian 116024, People's Republic of China
2. Department of Electrical Engineering and Computer Sciences-1770, University of California, Berkeley, California 94720, USA
Funder
Applied Materials Corporation, AKT Display Group
National Natural Science Foundation of China
Fundamental Research Funds for Central Universities
China Scholarship Council
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
https://aip.scitation.org/doi/pdf/10.1063/5.0075305
Reference59 articles.
1. Principles of Plasma Discharges and Materials Processing
2. Physics of Radio-Frequency Plasmas
3. Shaped electrode and lens for a uniform radio-frequency capacitive plasma
4. Ion flux nonuniformities in large-area high-frequency capacitive discharges
5. Standing wave and skin effects in large-area, high-frequency capacitive discharges
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