Efficient extraction window for high‐throughput x‐ray lithography beamlines
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1145755
Reference6 articles.
1. Synchrotrom radiation X-ray lithography
2. A Beamline and Its Components for SR Lithography
3. NTT superconducting storage ring—Super‐ALIS
4. High efficiency beamline for synchrotron radiation lithography
5. Super‐ALIS: NTT's exploring tool for ULSIs
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1. Generation of Strong Optical Field in Soft X-Ray Region by Using High-Order Harmonics;IEEE Journal of Selected Topics in Quantum Electronics;2004-11
2. Low-divergence coherent soft x-ray source at 13 nm by high-order harmonics;Applied Physics Letters;2004-01-05
3. Extreme ultraviolet emission from Xe clusters excited by high-intensity lasers;Journal of Applied Physics;2001-10
4. Defect Printability for 100 nm Patterns in X-Ray Lithography;Japanese Journal of Applied Physics;2001-02-15
5. Proximity X-ray and extreme ultraviolet lithography;Comptes Rendus de l'Académie des Sciences - Series IV - Physics;2000-09
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