Defect Printability for 100 nm Patterns in X-Ray Lithography
-
Published:2001-02-15
Issue:Part 1, No. 2A
Volume:40
Page:457-461
-
ISSN:0021-4922
-
Container-title:Japanese Journal of Applied Physics
-
language:en
-
Short-container-title:Jpn. J. Appl. Phys.
Author:
Watanabe Hiroshi,Marumoto Kenji,Matsui Yasuji
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering