Author:
Haelbich R.P.,Silverman J.P.,Warlaumont J.M.
Cited by
30 articles.
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1. Synchrotron X-ray scattering techniques for microelectronics-related materials studies;IBM Journal of Research and Development;2000-07
2. Droplet‐target laser‐plasma source for proximity x‐ray lithography;Applied Physics Letters;1996-05-06
3. Efficient extraction window for high‐throughput x‐ray lithography beamlines;Review of Scientific Instruments;1995-02
4. Novel single mirror condenser for x-ray lithography beam lines;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1994-11
5. Operating experience with the Helios compact storage ring at IBM;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1994-08