Author:
Silverman J.P.,Archie C.N.,Andrews D.E.,Weger A.J.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
5 articles.
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1. Evolution in Lithography Techniques: Microlithography to Nanolithography;Nanomaterials;2022-08-11
2. X-ray lithography: Some history, current status and future prospects;Microelectronic Engineering;2016-08
3. Challenges and progress in x-ray lithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-11
4. Microfabrication using synchrotron radiation;Reports on Progress in Physics;1998-04-01
5. X-ray lithography: Status, challenges, and outlook for 0.13 μm;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1997-11