1. Fabrication of 0.2 μm large scale integrated circuits using synchrotron radiation x-ray lithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1995-11
2. Lithography for micro-electronics;Radiation Physics and Chemistry;1995-03
3. Lithography;Fundamentals of Semiconductor Processing Technology;1995
4. Applicability test for synchrotron radiation x-ray lithography in 64-Mb dynamic random access memory fabrication processes;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1994-11
5. Operating experience with the Helios compact storage ring at IBM;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1994-08