1. J. H. McCoy, W. Lee, and G. L. Varnell, “Optical Lithography Requirements in the Early1990s,” Solid-State Technology, 32(3), 87–92 (1989).
2. L. F. Thompson and M. J. Bowden, “The Lithographic Process: The Physics,” Introduction to Microlithography, L. F. Thompson, M. J. Bowden, and C. Willson, Eds., American Chemical Society, 1983.
3. K. Jain, Excimer Laser Lithography, SPIE Optical Engineering Press, Bellingham, Washington, 1990.
4. C. K. Rhodes, Ed., Excimer Lasers, 2nd ed., Springer-Verlag, New York, 1984.
5. J. J. Ewing, “Rare Gas Halide Lasers,” Physics Today, 31, p. 32, May 1978.