Author:
Godbey D.,Hughes H.,Kub F.,Twigg M.,Palkuti L.,Leonov P.,Wang J.
Subject
Physics and Astronomy (miscellaneous)
Cited by
24 articles.
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1. Epi wafers: preparation and properties;Handbook of Silicon Based MEMS Materials and Technologies;2020
2. Introduction to Silicon Photonics;Computational Photonic Sensors;2018-06-14
3. Epi Wafers;Handbook of Silicon Based MEMS Materials and Technologies;2015
4. Materials and manufacturing techniques for silicon-on-insulator (SOI) wafer technology;Silicon-On-Insulator (SOI) Technology;2014
5. Selective Chemical Wet Etching of Si0.8Ge0.2/Si Multilayer;JSTS:Journal of Semiconductor Technology and Science;2013-12-31