Materials and manufacturing techniques for silicon-on-insulator (SOI) wafer technology-Reference-Cited by-同舟云学术

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Materials and manufacturing techniques for silicon-on-insulator (SOI) wafer technology

Published:2014 Issue: Volume: Page:3-51
ISSN:
Container-title:Silicon-On-Insulator (SOI) Technology
language:
Short-container-title:

Author:

Moriceau H.,Fournel F.,Rieutord F.

Publisher

Elsevier

Reference104 articles.

1. Silicon on Insulator Technology: Materials to VLSI;Colinge,1991

2. Semiconductor Wafer Bonding;Tong,1999

3. Silicon Wafer Bonding Tech. for VLSI and MEMS Applications;Aspar,2002

4. Frontiers of silicon-on-insulator

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