1. D. Crippa, D. Rode, M. Masi, Ssilicon Epitaxy, Semiconductors and Semimetals, Vol. 72, ISBN 0-12-752181-X, Academic Press, 2001.
2. Epitaxial silicon films by the hydrogen reduction of SiCl4;Theurer;J. Electrochem. Soc.,1961
3. The evolution of silicon wafer cleaning technology;Kern;J. Electrochem. Soc.,1990
4. Marangoni drying: a new extremely clean drying process;Leenaars;Langmuir,1990
5. Proceedings of the International Symposium on ULSI Process Integration IV;Meyer,2005