Impact of gas heating in inductively coupled plasmas
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1390503
Reference59 articles.
1. Radial flow effects in a multidimensional, three‐moment fluid model of radio frequency glow discharges
2. Non-equilibrium radial and axial transport in RF glow discharges
3. Two‐dimensional hybrid model of inductively coupled plasma sources for etching
4. Two-dimensional modeling of high plasma density inductively coupled sources for materials processing
5. Investigation of electron source and ion flux uniformity in high plasma density inductively coupled etching tools using two-dimensional modeling
Cited by 55 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Parametric study of a vortex-enhanced supersonic inductive plasma torch;Journal of Physics D: Applied Physics;2024-08-07
2. Energy efficient F atom generation and control in CF4 capacitively coupled plasmas driven by tailored voltage waveforms;Plasma Sources Science and Technology;2024-08-01
3. Hysteresis in radio frequency capacitively coupled CF4 plasmas;Plasma Sources Science and Technology;2024-08-01
4. Contribution of Ion Energy and Flux on High-Aspect Ratio SiO2 Etching Characteristics in a Dual-Frequency Capacitively Coupled Ar/C4F8 Plasma: Individual Ion Energy and Flux Controlled;Materials;2023-05-18
5. Bidirectional vortex stabilization of a supersonic inductively coupled plasma torch;Journal of Physics D: Applied Physics;2023-02-24
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3