Non-equilibrium radial and axial transport in RF glow discharges
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/26/i=3/a=025/pdf
Reference13 articles.
1. Numerical model of rf glow discharges
2. Two-dimensional simulations of rf glow discharges inN2andSF6
3. A Monte Carlo analysis of an electron swarm in a nonuniform field: the cathode region of a glow discharge in helium
4. Transition between different regimes of rf glow discharges
5. Particle simulations of radio-frequency glow discharges
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1. Impact of gas heating in inductively coupled plasmas;Journal of Applied Physics;2001-09
2. Hybrid Modeling of a Capacitively Coupled Radio Frequency Glow Discharge in Argon: Combined Monte Carlo and Fluid Model;Japanese Journal of Applied Physics;1999-07-30
3. Hybrid model of a rectangular hollow cathode discharge;Physical Review E;1998-06-01
4. Two-Dimensional Model of a Direct Current Glow Discharge: Description of the Electrons, Argon Ions, and Fast Argon Atoms;Analytical Chemistry;1996-01-01
5. Two-dimensional modeling of high plasma density inductively coupled sources for materials processing;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1994-01
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