Transition between different regimes of rf glow discharges
Author:
Publisher
American Physical Society (APS)
Subject
Atomic and Molecular Physics, and Optics
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevA.41.4447/fulltext
Reference37 articles.
1. A Continuum Model of DC and RF Discharges
2. Fluid model simulations of a 13.56‐MHz rf discharge: Time and space dependence of rates of electron impact excitation
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4. Continuum modeling of argon radio frequency glow discharges
5. Numerical model of rf glow discharges
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