Experimental study of the minimum metal gate thickness required to fix the effective work function in metal-oxide-semiconductor capacitors
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2833697
Reference12 articles.
1. Ab initio study of metal gate electrode work function
2. Island growth as a growth mode in atomic layer deposition: A phenomenological model
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