A heterodyne straightness and displacement measuring interferometer with laser beam drift compensation for long-travel linear stage metrology
Author:
Affiliation:
1. Nanometer Measurement Laboratory, Zhejiang Sci-Tech University, Hangzhou 310018, China
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4978802
Reference16 articles.
1. Development of a compact, fiber-coupled, six degree-of-freedom measurement system for precision linear stage metrology
2. Design and control of a long-traveling nano-positioning stage
3. Enhancing laser beam directional stability by single-mode optical fiber and feedback control of drifts
4. Laser beam alignment by fast feedback control of both linear and angular drifts
5. High-accuracy long distance alignment using single-mode optical fiber and phase plate
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