Design and control of a long-traveling nano-positioning stage
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference20 articles.
1. Dynamic piezoelectric translation devices;Pohl;Rev Sci Instrum,1987
2. Nanostep movement and measurement;Tipissev;Tribol Int,1996
3. Piezoactuators for motion control from centimeter to nanometer;Breguet,2000
4. Two-dimensional, remote micropositioner for a scanning tunneling microscope;Mamin;Rev Sci Instrum,1985
5. Simple, high precision linear-motor-driven XYθ positioner (Walker);Dudnikov;Rev Sci Instrum,1991
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