Nanopositioning X–Y stage with an embedded Six-DOF error compensation system based on Abbe and Bryan principles-Reference-Cited by-同舟云学术

Nanopositioning X–Y stage with an embedded Six-DOF error compensation system based on Abbe and Bryan principles

Published:2024-03 Issue: Volume:227 Page:114218
ISSN:0263-2241
Container-title:Measurement
language:en
Short-container-title:Measurement

Author:

He Ya-Xiong,Lin Rong-Wei,Li Rui-Jun^ORCID,Li Jie,Cheng Zhen-Ying,Pan Qiao-Sheng,Huang Qiang-Xian^ORCID,Fan Kuang-Chao^ORCID

Funder

National Natural Science Foundation of China

National Key Research and Development Program of China

Publisher

Elsevier BV

Reference34 articles.

1. International Technology Roadmap for Semiconductors, Executive summary: Grand challenges, Itrs. (2009) [online] Available: http://www.itrs.net. http://www.itrs.net/Links/2009ITRS/2009Chapters_2009Tables/2009_ExecSum.pdf.

2. Recent developments and challenges of nanopositioning and nanomeasuring technology;Manske;Meas. Sci. Technol.,2012

3. Accuracy enhancement of five-axis machine tool based on differential motion matrix: geometric error modeling, identification and compensation;Fu;Int. J. Mach. Tools Manuf.,2015

4. High-precision XY stage motion control of industrial microscope;Lim;IEEE Trans. Ind. Electron.,2019

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A three-degrees-of-freedom motion error measurement system based on Mach–Zehnder interferometry;Measurement;2024-10

2. NPS6D200—A Long Range Nanopositioning Stage with 6D Closed Loop Control;Applied Sciences;2024-08-08

3. Allocation of geometrical errors for developing precision measurement machine;Journal of Intelligent Manufacturing;2024-06-27