A Straightness Error Compensation System for Topography Measurement Based on Thin Film Interferometry

Abstract

Straightness error compensation is a critical process for high-accuracy topography measurement. In this paper, a straightness measurement system was presented based on the principle of fringe interferometry. This system consisted of a moving optical flat and a stationary prism placed close to each other. With a properly aligned incident light beam, the air wedge between the optical flat and the prism would generate the interferogram, which was captured by a digital camera. When the optical flat was moving with the motion stage, the variation in air wedge thickness due to the imperfect straightness of the guideway would lead to a phase shift of the interferogram. The phase shift could be calculated, and the air wedge thickness could be measured accordingly using the image processing algorithm developed in-house. This air wedge thickness was directly correlated with the straightness of the motion stage. A commercial confocal sensor was employed as the reference system. Experimental results showed that the repeatability of the proposed film interferometer represented by σ was within 25 nm. The measurement deviation between the film interferometer and the reference confocal sensor was within ±0.1 µm. Compared with other interferometric straightness measurement technologies, the presented methodology was featured by a simplified design and good environment robustness. The presented system could potentially be able to measure straightness in both linear and angular values, and the main focus was to analyze its linear value measurement capability.