Development of a compact, fiber-coupled, six degree-of-freedom measurement system for precision linear stage metrology-Reference-Cited by-同舟云学术

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Development of a compact, fiber-coupled, six degree-of-freedom measurement system for precision linear stage metrology

Published:2016-06 Issue:6 Volume:87 Page:065109
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Yu Xiangzhi¹^ORCID,Gillmer Steven R.¹,Woody Shane C.²,Ellis Jonathan D.¹³

Affiliation:

1. Department of Mechanical Engineering, University of Rochester, Rochester, New York 14627, USA

2. InSituTec Incorporated, 7140 Weddington Road, Concord, North Carolina 28027, USA

3. The Institute of Optics, University of Rochester, Rochester, New York 14627, USA

Funder

National Science Foundation (NSF)

National Institute of Standards and Technology (NIST)

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://scitation.aip.org/deliver/fulltext/aip/journal/rsi/87/6/1.4953335.pdf?itemId=/content/aip/journal/rsi/87/6/10.1063/1.4953335&mimeType=pdf&containerItemId=content/aip/journal/rsi

Reference27 articles.

1. Recent advances in displacement measuring interferometry

2. Developments at PTB in nanometrology for support of the semiconductor industry

3. Heterodyne interferometer with subatomic periodic nonlinearity

4. Michelson interferometry with 10 pm accuracy

5. High resolution heterodyne interferometer without detectable periodic nonlinearity

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3. Optical Angle Barcodes Enabled by a Pixelated Metasurface for Absolute Micro‐Angle Measurement;Laser & Photonics Reviews;2023-11-16

4. Multi-Axis Laser Interferometer Not Affected by Installation Errors Based on Nonlinear Computation;Applied Sciences;2023-09-30

5. Development of a precision vertical planar stage as a programmable planar artefact;Measurement;2023-08

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