Development of a precision vertical planar stage as a programmable planar artefact

Author:

Zhang Jiyun,Lou Zhifeng,Fan Kuang-ChaoORCID,Zhang Hanping,Zhou Jingjie

Funder

National Natural Science Foundation of China

Fundamental Research Funds for the Central Universities

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference41 articles.

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5. ISO 230-1, Test Code for Machine Tools-Part 1: Geometric accuracy of machine operating under no-load or quasi-static conditions. International Organization for Standardization (2012).

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