Development of fixed-point two-degree-of-freedom positioning errors measurement system with precision improvement function-Reference-Cited by-同舟云学术

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Development of fixed-point two-degree-of-freedom positioning errors measurement system with precision improvement function

Published:2025-01 Issue: Volume:239 Page:115525
ISSN:0263-2241
Container-title:Measurement
language:en
Short-container-title:Measurement

Author:

Hsu Yu-Shuo,Liu Chien-Sheng^ORCID,Hung Jui-Hsiang,Chiang Hsin-Hua

Publisher

Elsevier BV

Reference26 articles.

1. Measurement system and model for simultaneously measuring 6dof geometric errors;Zhao;Opt. Express,2017

2. Development of a precision vertical planar stage as a programmable planar artefact;Zhang;Measurement,2023

3. Automatic compensation of thermal drift of laser beam through thermal balancing based on different linear expansions of metals;Yang;Results Phys.,2019

4. Drift reduction of a 4-dof measurement system caused by unstable air refractive index;Li;Sensors,2020

5. Measurement of the changes in air refractive index and distance by means of a two-color interferometer;Matsumoto;Appl. Opt.,1992

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