Large piezoelectricity response in Li and Ti (or Zr) co-alloyed w-AlN

Author:

Tao Zechao1ORCID,Hu Zhibin1,Xie Liu2,Sun Chengliang1ORCID,Tang Qiang1ORCID,Liu Yonghui3,Jia Jun4ORCID,Guo YuZheng3ORCID,Wang Jun3,Wu Guoqiang15ORCID

Affiliation:

1. The Institute of Technological Sciences, Wuhan University, Wuhan, Hubei 430072, China

2. Yangtze Memory Technologies Co., Ltd., Wuhan 430074, China

3. School of Electrical Engineering and Automation, Wuhan University, Wuhan, Hubei 430072, China

4. College of Chemistry and Chemical Engineering, Xiamen University, Xiamen, Fujian 361001, China

5. Hubei Yangtze Memory Laboratories, Wuhan 430205, China

Abstract

As one of the most important piezoelectric materials for piezoelectricity related devices, the performance of wurtzite-type aluminum nitride (w-AlN) is still inhibited by its low piezoelectric coefficients. Herein, we have proposed a new co-alloying w-AlN system by Li+ and Ti4+ (or Zr4+) in a ratio of 1:2 and systematically compared its piezoelectric properties with state-of-the-art Sc-alloyed w-AlN via the first-principle method. It is found that the co-alloyed w-AlN shows obvious advantages over Sc-alloyed w-AlN in nearly all aspects of piezoelectric performance. The piezoelectric strain coefficient (d33) of (LiTi2)0.375Al0.625N reaches 213.25 pC/N, about 8 times and 41 times that of Sc0.375Al0.625N and pure w-AlN, respectively. Additionally, the large enhancement of piezoelectricity of co-alloyed w-AlN was successfully related to the elastic softening, the increased Born effective charge [Formula: see text], and the decreased internal strain sensitivity [Formula: see text]. This work provides a new way to enhance the performance of incumbent piezoelectric materials by accessible elements instead of Sc.

Funder

Natural Science Foundation of Hubei Province

National Natural Science Foundation of China

Publisher

AIP Publishing

Subject

General Physics and Astronomy

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