Piezoelectric thin AlN films for bulk acoustic wave (BAW) resonators
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science
Reference16 articles.
1. High-Q microwave acoustic resonators and filters
2. Development of miniature filters for wireless applications
3. K.M. Lakin, in: Proceedings of the 1999 IEEE Ultrasonic Symposium, Lake Tahoe, 1999, p. 895.
4. J.D. Larson III, R. Ruby, P. Bradley, Y. Oshmyansky, in: Proceedings of the 1999 IEEE Ultrasonic Symposium, Lake Tahoe, 1999, p. 887.
5. M.A. Dubois, P. Muralt, V. Plessky, in: Proceedings of the 1999 IEEE Ultrasonic Symposium, Lake Tahoe, 1999, p. 907.
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