BAW resonators based on aluminum nitride thin films-Reference-Cited by-同舟云学术

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BAW resonators based on aluminum nitride thin films

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Container-title:1999 IEEE Ultrasonics Symposium. Proceedings. International Symposium (Cat. No.99CH37027)
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Author:

Dubois M.-A.,Muralt P.,Plessky V.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/6852/18457/00849136.pdf?arnumber=849136

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