Author:
Sinha Nipun,Wabiszewski Graham E.,Mahameed Rashed,Felmetsger Valery V.,Tanner Shawn M.,Carpick Robert W.,Piazza Gianluca
Subject
Physics and Astronomy (miscellaneous)
Reference18 articles.
1. Technical Digest of the Solid-State Sensors, Actuators, and Microsystems Workshop;Judy D. C.,2008
2. Proceedings of the 22nd IEEE International Conference on Micro Electro Mechanical Systems;Judy D. C.,2009
3. Prospects for logic-on-a-wire
4. Fabrication and characterization of a nanoelectromechanical switch with 15-nm-thick suspension air gap
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